| Device Name | Flash (Kbytes) | Temp. Range (deg C) | Meter Type | Dynamic Range | Active Meas. Accy (%) | Reactive Meas. Accy (%) | Temp Coefficient Type (ppm/degC) | Packages |
| 90E21 | -40 to 85 | Single-Phase | 5000:01:00 | 0.1 | 15 | |||
| 90E22 | -40 to 85 | Single-Phase | 5000:01:00 | 0.1 | 0.2 | 15 | ||
| 90E23 | -40 to 85 | Single-Phase | 5000:01:00 | 0.1 | 15 | |||
| 90E24 | -40 to 85 | Single-Phase | 5000:01:00 | 0.1 | 0.2 | 15 | ||
| ATM90E25 | -40 to 85 | Single-Phase | 5000:01:00 | 0.1 | 0.2 | 15 | ||
| ATM90E32AS | -40 to 85 | Poly-Phase | 5000:01:00 | 0.1 | 0.2 | 6 | ||
| ATM90E36A | -40 to 85 | Poly-Phase | 6000:01:00 | 0.1 | 0.2 | 6 | ||
| ATSAM4C16 | 1024 | -40 to 85 | LQFP R-LQ100_R 100 | |||||
| ATSAM4C8 | 512 | -40 to 85 | LQFP R-LQ100_R 100 | |||||
| ATSAM4CMP16 | 1024 | -40 to 85 | Poly-Phase | 3000:01:00 | 0.1 | 0.2 | LQFP R-LQ100_R 100 | |
| ATSAM4CMP8 | 512 | -40 to 85 | Poly-Phase | 3000:01:00 | 0.1 | 0.2 | LQFP R-LQ100_R 100 | |
| ATSAM4CMS16 | 1024 | -40 to 85 | Single-Phase | 3000:01:00 | 0.1 | 0.2 | LQFP R-LQ100_R 100 | |
| ATSAM4CMS8 | 512 | -40 to 85 | Single-Phase | 3000:01:00 | 0.1 | 0.2 | LQFP R-LQ100_R 100 | |
| ATSENSE101 | -40 to 85 | Single-Phase | 3000:01:00 | 0.1 | 0.2 | SOIC 20S2 20 | ||
| ATSENSE301(H) | -40 to 85 | Poly-Phase | 3000:01:00 | 0.1 | 0.2 | TQFP 32A 32 |