MEMS 惯性传感器

惯性感测技术可以检测和测量加速度、倾斜、冲击、振动、旋转和多自由度(DoF)运动,帮助实现各种市场分化的工业、医疗、通信、消费和汽车应用。作为领先的MEMS技术创新者,ADI公司提供iMEMS®惯性感测器件,涵盖加速度计和陀螺仪,以及iSensor® 智能传感器,包括集成式惯性测量单元(IMU)。

MEMS Accelerometer
Part# Results: 18 # of Axes Range Typical Bandwidth (kHz) Sensitivity Sensitivity Accuracy (%) Output Type Noise Density (µg/rtHz) Voltage Supply (V) Supply Current Temp Range (°C) Package
ADXL212 2 +/- 2g 0.5 12.5 %/g 12.5 Digital - 3 to 5.25 700µA -40 to 85°C 8-Lead LCC
ADXL206 2 +/- 5g - 312 mV/g - Analog 110 4.75 to 5.25 700µA -40 to 175°C 8-Lead SBDIP
ADXL312 3 +/- 12 g 1.6 345 LSB/g - Digital 340 2.0 to 3.6 170µA -40 to 105°C 5mm x 5mm LFCSP
ADXL337 3 +/- 3.6g 1.6 300 mV/g - Analog 175 1.8 to 3.6 300µA -40 to 85°C 3mm x 3mm LFCSP
ADXL325 3 +/- 5g 1.6 174 mV/g 10 Analog 250 1.8 to 3.6 350µA -40 to 85°C 4mm x 4mm LFCSP
ADXL326 3 +/- 16g 1.6 57 mV/g 10 Analog 250 1.8 to 3.6 350µA -40 to 85°C 4mm x 4mm LFCSP
ADXL327 3 +/- 2g 1.6 420 mV/g 10 Analog 250 1.8 to 3.6 350µA -40 to 85°C 4mm x 4mm LFCSP
ADXL346 3 +/- 2/4/8/16g 1.6 up to 256 LSB/g 10 Digital - 1.7 to 2.75 145µA -40 to 85°C 3mm x 3mm x 0.95 mm LGA
ADXL345 3 +/- 2/4/8/16g 1.6 up to 256 LSB/g 10 Digital - 2.0 to 3.6 145µA -40 to 85°C 3mm x 5mm x 1mm LGA
ADXL001 1 +/- 70g 22 16 mV/g (+/- 70g) - Analog 4000 3.135 to 6 5mA -40 to 125°C 5mm x 5mm Ceramic LCC
ADXL335 3 +/- 3g 1.6 300 mV/g 10 Analog 300 1.8 to 3.6 350µA -40 to 85°C 4mm x 4mm LFCSP
ADXL180 1 50 g to 500 g 0.8 0.125 g/LSB (50 g), 1.25 g/LSB (500 g) - Digital - 5 to 14.5 7.7mA -40 to 125°C CP-16
ADXL103 1 +/- 1.7g 2.5 1000 mV/g 4 Analog 110 3 to 6 700µA -40 to 125°C 5mm x 5mm x 2mm LCC
ADXL203 2 +/- 1.7g 2.5 1000 mV/g 4 Analog 110 3 to 6 700µA -40 to 125°C 5mm x 5mm x 2mm LCC
ADXL213 2 +/- 1.2g 2.5 30 %/g 10 PWM 160 3 to 6 700µA -40 to 85°C 5mm x 5mm x 2mm LCC
ADXL193 1 +/- 250g 0.4 8 mV/g 5 Analog 5000 4.75 to 5.25 1.5mA -40 to 125°C E-8
ADXL278 2 +/- 70g 0.4 27mV/g 5 Analog 1800 4.75 to 5.25 2.2mA -40 to 105- 5mm x 5mm Ceramic LCC
ADXL78 1 +/- 70g 0.4 27mV/g 5 Analog 1800 4.75 to 5.25 1.3mA -40 to 105- 5mm x 5mm Ceramic LCC
iSensor MEMS Accelerometer Subsytems
Part# Results: 12 Product Description Output Type Sensing Axes Typical Bandwidth (kHz) Voltage Supply (V) Range Sensitivity Sensitivity Accuracy (%) Temp Range (°C) Package
ADIS16228 Digital Triaxial Vibration Sensor with FFT Analysis and Storage SPI X, Y, Z 5 3.15 to 3.6 - - 6 -40 to 125°C -
ADIS16210 Precision Triaxial Inclinometer and Accelerometer with SPI SPI X, Y, Z 0.05 3.15 to 3.6 +/- 1.7g - 0.21 -40 to 85°C -
ADIS16227 Digital TriAxial Vibration Sensor with FFT Analysis and Storage SPI X, Y, Z 9 - +/- 70g - 5 -40 to 125°C -
ADIS16223 Digital Tri-axial Vibration Sensor SPI X, Y or Z 14.25 3.15 to 3.6 +/- 70g 4.768 mg/LSB 5 -40 to 125°C -
ADIS16220 PROGRAMMABLE DIGITAL VIBRATION SENSOR SPI X 1 3.15 to 3.6 +/- 70g 19.073 mg/LSB - -40 to 125°C 9.2mm x 9.2mm LGA
ADIS16240 Programmable Hi-G Digital Accelerometer, Impact Sensor SPI X, Y, Z 1.6 2.4 to 3.6 +/- 18g 51.4 mg/LSB - -40 to 105°C 12 mm x 12 mm BGA
ADIS16209 High Accuracy (0.1°), Dual-Axis Digital Accelerometer/Inclinometer SPI X, Y 0.05 3 to 3.6 +/- 90° or +/- 180° 0.025 °/LSB 0.4 -40 to 125°C 9 mm x 9mm LGA
ADIS16204 Programmable Hi-G Digital Accelerometer, Impact Sensor SPI X, Y 0.4 3 to 3.6 +/- 70g X & +/- 37g Y 17.13 mg/LSB - -40 to 105°C 9 mm x 9mm LGA
ADIS16203 Programmable Single Axis 360° Inclinometer SPI Z 2.25 3 to 3.6 +/- 180° 0.025 °/LSB - -40 to 125 9 mm x 9mm LGA
ADIS16006 Dual Axis ±5g Accelerometer with SPI Interface SPI X, Y 2.25 3 to 5.25 +/- 5g 3.91 mg/LSB 6 -40 to 125°C 7mm x 7mm LGA
ADIS16201 Programmable Dual Axis Accelerometer/Inclinometer SPI X, Y 2.25 3 to 3.6 +/- 1.7g 0.10 °/LSB 1 -40 to 125 9 mm x 9mm LGA
ADIS16003 Dual Axis ±1.7g Accelerometer with SPI Interface SPI X, Y 2.25 3 to 5.25 +/- 1.7g 1.22 mg/LSB 7 -40 to 125°C 7mm x 7mm LGA
iSensor MEMS Inertial Measurement Units
Part# Results: 15 Product Description Range Typical Bandwidth (kHz) Sensitivity Noise Density (°/s/rtHz) Voltage Supply (V) Supply Current Temp Range (°C) Package
ADIS16488 Triaxial, digital gyroscope with digital range scaling +/- 450 °/s 0.33 - 0.005 3 to 3.6 254mA -40 to 85°C 44 x 47 x 14 mm Mod
ADIS16407 Ten Degrees of Freedom Inertial Sensor +/- 75 to 300 °/s 0.33 0.05 °/s/LSB (+/-300°/s) - 4.75 to 5.25 70mA -40 to 85°C -
ADIS16334 Low Profile 6 DoF Inertial Sensor +/- 75 to 300 °/s 0.33 0.0125°/s/LSB (+/-75°/s) 0.044 4.75 to 5.25 47mA -40 to 105°C 33 mm x 22 mm x 11 mm Mod
ADIS16375 Low Profile, Low Noise Six Degrees of Freedom Inertial Sensor +/ - 300 °/s 0.33 0.01311 °/s/LSB 0.02 3 to 3.6 173mA -40 to 85°C 44 x 47 x 14 mm Mod
ADIS16305 Precision Four Degrees of Freedom Sensor +/- 75 to +/- 300 °/s 0.33 0.0125°/s/LSB (+/-75°/s) 0.04 4.75 to 5.25 42mA -40 to 85 (31 x 23 x 7.5) mm Mod
ADIS16385 Six Degrees of Freedom Inertial Sensor +/- 75 to +/- 300 °/s 0.33 0.0031°/s/LSB(+/-75°/s) 0.04 4.85 to 5.15 132mA -40 to 105°C (36 x 47 x 39) mm Mod
ADIS16367 6 DoF Sensor (-40 to 85C CAL) +/- 300 to +/-1200 °/s 0.33 0.05 °/s/LSB (+/-300°/s) 0.044 4.75 to 5.25 49mA -40 to 105°C -
ADIS16362 6 DoF Inertial Sensor (-20 to 70C CAL) +/- 75 to 300 °/s 0.33 0.0125°/s/LSB (+/-75°/s) 0.044 4.75 to 5.25 49mA -40 to 105°C 23 mm x 23 mm x 23 mm Mod
ADIS16400 High Precision Tri-Axis Gyroscope, Accelerometer, Magnetometer +/- 75 to +/- 300 °/s 0.33 0.0125°/s/LSB (+/-75°/s) 0.05 4.75 to 5.25 70mA -40 to 105°C 23 mm x 23 mm x 23 mm Mod
ADIS16405 High Precision Tri-Axis Gyroscope, Accelerometer, Magnetometer (with Temp CAL) +/- 75 to +/- 300 °/s 0.33 0.0125°/s/LSB (+/-75°/s) 0.05 4.75 to 5.25 70mA -40 to 105°C 23 mm x 23 mm x 23 mm Mod
ADIS16360 6 DoF Sensor (Room Temp CAL) +/- 75 to +/- 300 °/s 0.33 0.0125°/s/LSB (+/-75°/s) 0.05 4.75 to 5.25 49mA -40 to 105°C 23 mm x 23 mm x 23 mm Mod
ADIS16364 6 DoF Sensor (-20 to 70C CAL) +/- 75 to 300 °/s 0.33 0.0125°/s/LSB (+/-75°/s) 0.05 4.75 to 5.25 49mA -40 to 105°C 23 mm x 23 mm x 23 mm Mod
ADIS16365 6 DoF Sensor (-40 to 85C CAL) +/- 75 to +/- 300 °/s 0.33 0.0125°/s/LSB (+/-75°/s) 0.05 4.75 to 5.25 49mA -40 to 105°C 23 mm x 23 mm x 23 mm Mod
ADIS16300 4 DoF Inertial Sensor +/- 75 to +/- 300 °/s 0.33 0.0125°/s/LSB (+/-75°/s) 0.038 4.75 to 5.25 46.2mA -40 to 85°C (31 x 23 x 7.5) mm Mod
ADIS16354 6 DoF Sensor (-20 to 70C CAL) +/- 75 to +/- 300 °/s 0.35 0.0183 °/s/LSB (+/-80°/s) 0.05 4.75 to 5.25 57mA -40 to 85°C 23 mm x 23 mm x 23 mm Mod
MEMS Gyroscopes
Part# Results: 11 Range Sensitivity Typical Bandwidth (kHz) Noise Density (°/s/rtHz) Nonlinearity Temp Sensor Voltage Reference Voltage Supply (V) Supply Current Temp Range (°C) Package
ADXRS450 +/-300 °/s 80 LSB/°/s 0.08 0.015 0.04% of FS Yes No 3 to 5.25 6mA -40 to 105°C 14-LCC, 16-Lead SOIC
ADXRS453 +/ - 300 °/s 80 LSB/°/s 0.0775 0.015 0.05% of FS rms Yes No 3 to 5.25 6mA -40 to 105°C 14-LCC, 16-Lead SOIC
ADXRS620 +/-300 °/s 6 mv/°/s 2.5 0.05 0.1% of FS Yes No 4.75 to 5.25 3.5mA -40 to 105°C 7 mm x 7mm x 3mm BGA
ADXRS622 +/- 250 °/s 7 mV/°/s 2.5 0.06 0.1% of FS Yes No 4.75 to 5.25 3.5mA -40 to 105°C 7 mm x 7mm x 3mm BGA
ADXRS623 +/- 150 °/s 12.5mV/°/s 3 0.04 0.1% of FS Yes No 4.75 to 5.25 3.5mA -40 to 105°C 7 mm x 7mm x 3mm BGA
ADXRS624 +/- 50 °/s 25 mV/°/s 1 0.04 0.1% of FS Yes No 4.75 to 5.25 3.5mA -40 to 105°C 7 mm x 7mm x 3mm BGA
ADXRS642 +/- 250 °/s 7 mV/°/s 2 0.02 0.1% of FS Yes No 4.75 to 5.25 3.5mA -40 to 105°C 7mm x 7mm x 3mm BGA
ADXRS646 +/- 250 °/s 9 mV/°/s 1 0.01 0.01% of FS Yes - 5.75 to 6.25 4mA -40 to 125°C 7 mm x 7mm x 3mm BGA
ADXRS649 +/- 20000 °/s 0.1 mV/°/s 2 0.25 0.1% of FS Yes No 4.75 to 5.25 3.5mA -40 to 105°C 7 mm x 7mm x 3mm BGA
ADXRS652 +/- 250 °/s 7 mV/°/s 2.5 0.06 0.1% of FS Yes No 4.75 to 5.25 3.5mA -40 to 105°C 7 mm x 7mm x 3mm BGA
ADXRS800 +/-300 °/s - - - - Yes - 3 to 5 - -40 to 105°C 16-Lead SOIC
iSensor MEMS Gyroscope Subsystems
Part# Results: 11 Product Description Range Typical Bandwidth (kHz) Sensitivity Noise Density (°/s/rtHz) Voltage Supply (V) Supply Current Temp Range (°C) Package
ADIS16136 ±450°/Sec Precision Angular Rate Sensor - 0.38 - - 4.75 to 5.25 120mA -40 to 85 -
ADIS16133 ±1200°/sec Precision Angular Rate Sensor +/- 1400 0.335 0.05 °/s/LSB 0.0122 4.85 to 5.15 88mA -40 to 105°C 36 mm x 44 mm Mod
ADIS16135 HIgh Precision Angular Rate Sensor +/ - 300 °/s 0.335 0.0122 °/s/LSB 0.0122 4.75 to 5.25 88mA -40 to 85°C 36 mm x 44 mm Mod
ADIS16260 Programmable Low Power Gyroscope +/- 80 to +/- 320 °/s 0.05 0.0183 °/s/LSB 0.044 4.75 to 5.25 41mA - 11.1 mm x 11.1mm LGA
ADIS16265 Programable Digital Gyro Calibration temperature range: −40°C to +85°C +/- 80 to +/- 320 °/s 0.05 0.0183 °/s/LSB 0.044 4.75 to 5.25 41mA -40 to 125°C 11.1 mm x 11.1mm LGA
ADIS16060 Wide Bandwidth Digital Output Gyro +/- 80 °/s 1 0.0122 °/s/LSB 0.04 4.75 to 5.25 6.5mA -40 to 105°C 8mm x 8mm LGA
ADIS16130 Digital Output High Precision Gyro +/- 250 °/s 0.3 0.000042 °/s/LSB 0.0125 4.75 to 5.25 73mA -40 to 85°C 36 mm x 44 mm Mod
ADIS16251 Programable Gyro +/- 20 to +/- 80 °/s 0.05 0.00458 °/s/LSB 0.056 4.75 to 5.25 44mA -40 to 85°C 11.1 mm x 11.1mm LGA
ADIS16080 Digital Output Gyro +/- 80 °/s 0.04 0.098 °/s/LSB 0.05 4.75 to 5.25 7mA -40 to 85 8mm x 8mm LGA
ADIS16120 Low Noise Gyro +/ - 300 °/s 0.32 0.2 °/s/mV 0.015 4.75 to 5.25 95mA -40 to 85 36 mm x 42 mm Mod
ADIS16100 Digital Output Gyro +/-300 °/s 0.04 0.244 °/s/LSB 0.05 4.75 to 5.25 7mA -40 to 85 8mm x 8mm LGA